Used PLASMATHERM / UNAXIS 7000 (EMS) #9258753 for sale

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ID: 9258753
Vintage: 1994
Reactive Ion Etch (RIE) system 1994 vintage.
UNAXIS 7000 (EMS) is an advanced etcher and asher used for thin films fabrication in the semiconductor industry. It offers an industry-leading maximum throughput performance for maximum efficiency. PLASMATHERM 7000's etching and ashing process is highly precise and consistent, making it ideal for the production of electronic components. It has high performance capabilities thanks to its combination of a powerful vacuum etching chamber and a heating coil for ashing materials quickly and cleanly. The dual process ETCH-ASH equipment offers advanced process control capabilities and features a variety of advanced technical measurements for precision and accuracy. The pressure control is precise, enabling the system to produce uniform results. The process can be programmed for individual recipes according to the target product's requirements. The unit's high performance capabilities, durable metallurgy, and efficient thermal management machine also make it reliable for long-term use. PLASMATHERM / UNAXIS 7000 (EMS) also features advanced robotics for precise motion control with high accuracy. The tool has multiple robotic slots available for customizing recipes to produce highest quality results with the highest throughput. The asset also has an integrated vision model that can detect parts automatically for better control of the process. Advanced gas delivery systems are used for easier control of etching performance. This equipment is designed to deliver different flows of gases for specific processes. It also has a three-sided RF generator for controlling the plasma process, and a remote diagnostics panel for operator convenience. The system is equipped with a notification unit to alert operators when it needs maintenance or repair. Safety is also built into the design of this machine. The tool has safety interlocks to prevent unauthorised access. It also has RF sheilding to ensure radiation safety and protection for operators. The asset is designed to be compact and clean, with a minimium of moving parts and low power consumption. Overall, UNAXIS 7000 (EMS) is a powerful etcher and asher that offers advanced performance, precision and control capabilities. Its advanced features and automated processes make it highly efficient and reliable, while its safety features ensure operators are properly protected. It is well suited for use in the production of electronic components requiring precise etching and ashing.
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