Used PLASMATHERM / UNAXIS 790 Series #9225839 for sale

PLASMATHERM / UNAXIS 790 Series
ID: 9225839
Wafer Size: 6"
System, 6".
PLASMATHERM / UNAXIS 790 Series of plasma etchers/ashers is designed to meet the demands of semiconductor manufacturing. It has a proven track record in achieving high-precision plasma etching and ashing with Application Specific Integrated Circuits (ASIC) Integrated Circuit (IC) Applications. UNAXIS 790 Series features a low-distortion design, incorporating a unique uniform plasma distribution technology. This ensures high etching and ashing accuracy, even for the most challenging form factors and applications. PLASMATHERM 790 Series is constructed of stainless steel and features industry leading technology for clean operation and high-precision etching. A high-efficiency ICP power supply, advanced cooling equipment, and independent gas delivery systems, provide a robust, reliable platform for your etching requirements. 790 Series is equipped with high-end camera for accurate wafer inspection and a touch-controlled panel interface for ease of use and to further enhance the etching process. The adjustable optical system, coupled with the high resolution imaging, enables high precision etching tools for any form factor and application. PLASMATHERM / UNAXIS 790 Series comes with a variety of applications and etching options, including reactive ion etching, oxide etching, and chem. The reactive ion etching process uses a combination of chemicals and ions to achieve accurate etching results with low surface damage. Oxide etching uses an oxide layer for layer specific etching, allowing for precise control of an etching pattern. The chem etching feature in UNAXIS 790 Series is used for high throughput etching and works quickly to achieve accurate results. PLASMATHERM 790 Series also enables process and tool monitoring capabilities, allowing for troubleshooting and performance assessment. This provides an easy-to-use and reliable platform for both in-process monitoring and end-process evaluation. With the ability to monitor aspects such as chamber pressure, gas flow, RF power, and the etch/ash rate, users can ensure consistent, high-quality etching results. 790 Series offers a number of additional features to maintain an accurate etching process, such as pressure control, temperature regulation, and chamber purging. Pressure control ensures a consistent atmosphere in the chamber, while temperature regulation ensures optimal etching and ashing performance. The chamber purging feature helps keep the chamber clean by removing unwanted particles and materials. Finally, PLASMATHERM / UNAXIS 790 Series also includes an advanced safety unit, which monitors potential hazards and helps reduce the risk of accidents and damage. UNAXIS 790 Series provides a reliable platform for etching and ashing in a variety of semiconductor applications. Its low-distortion design, ICP power supply, advanced cooling and gas delivery systems, plus a range of etching and monitoring features work together to achieve precise effects and consistent results. Quality assurance and safety are taken into consideration to provide a dependable machine for your etching needs.
There are no reviews yet