Used PLASMATHERM / UNAXIS 790 Series #9359353 for sale

ID: 9359353
Reactive Ion Etcher (RIE) system NESLAB HX-75 Chiller EWARDS QDP40 Pump.
PLASMATHERM / UNAXIS 790 Series of etcher/asher is an advanced semiconductor processing equipment for etching and ashing applications. This etcher/asher system uses a combination of dual- frequency microwave plasma technology and high-resolution temperature control for optimal etching and ashing performance. UNAXIS etcher/asher supports both batch processing and single wafer processes for both etching and ashing, allowing the user to quickly switch between etching and ashing processes. The unit is designed with an advanced pressure control machine to ensure optimum etching and ashing performance. This tool not only helps maintain a high degree of accuracy, but also provides process control and repeatability. PLASMATHERM etcher/asher is equipped with a powerful inert gas pumping asset to allow the user to effectively control chamber pressure and temperature in order to optimize the etching/ashing process. This model also helps improve the performance of the process by helping to minimize the build-up of background gas. The equipment is also equipped with a temperature controller to maintain a precisely-controlled environment within the etcher/asher and enhance the etching and ashing performance. PLASMATHERM / UNAXIS etcher/asher is designed for customizable end-point control (EPC) to ensure precise results for each etching and ashing process. The EPC allows the user to set parameters such as the etching time and the temperature, as well as the power level for each process. This allows greater control over the etching and ashing performance and improved process repeatability. UNAXIS etcher/asher also comes with advanced safety features such as an interlock system to ensure the safety of personnel, and a door lockout to prevent unauthorized operation of the unit. The machine is designed to meet the highest standards of safety in the semiconductor industry in order to protect against accidents and degradation of process performance. Overall, UNAXIS 790 Series is an advanced etcher/asher tool designed to provide high performance etching and ashing results. The asset is designed to provide precise, reproducible results, a wide range of end-point control capabilities, and advanced safety features, making it an ideal choice for both production and research-based processing.
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