Used PLASMATHERM / UNAXIS 790 #9156667 for sale
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ID: 9156667
Wafer Size: 8"
Vintage: 2001
PECVD system, 8"
Non-load lock
Heated lower electrode
Water cooled / heated chamber
Advanced Energy RF5S 500W 13.56 MHz power supply with match work
Windows OS
208 V, 60 A, 50/60 Hz
2001 vintage.
PLASMATHERM / UNAXIS 790 is an advanced, high-performance parallel plate rodless etcher/asher equipment. It is designed for the reliable and economical etching of complex surfaces. UNAXIS 790 facilitates rapid etching of substrates up to 250mm in diameter, while providing high-precision operation. It features a process chamber with two independent series of etching and ashing electrodes made up of a combination of static electrodes, fixed dynamic electrodes and independent sweepable electrodes. This provides users with flexibility in the etch pattern, allowing for uniform or selective etching of any surface geometry. PLASMATHERM 790 is equipped with an intuitive automated control system, including a variety of remote control options. It is designed for easy assembly, operation and maintenance. It features a compact footprint, allowing it to fit into most laboratory settings. The sleek and highly integrated unit offers reliable and accurate etching with excellent repeatability. 790 utilizes four independent gas distribution systems that enable the user to adjust the flow rates and mix of different gases to achieve precise etching control. The machine is capable of easily integrating different sources of plasma, such as radiofrequency (RF), ultraviolet (UV) and direct current (DC) plasma sources, to provide a wide range of etch capabilities. An optimized load locking tool adds further process versatility, allowing for quick substrate exchange and reproducible results. PLASMATHERM / UNAXIS 790 also features an extensive range of etching and deposition recipes, making it easy to customize the etching parameters for specific applications. The asset incorporates several advanced safety features, such as over-temperature and over-pressure protection, ensuring that the model is operating efficiently and safely at all times. The equipment is designed for long-term stable etching, with excellent uniformity within the etched area. Additionally, UNAXIS 790 comes with a user-friendly integrated data logging system, which allows for easy monitoring of etch results. Overall, PLASMATHERM 790 is an ideal etching unit for laboratories that require reliable, precise, and cost-effective etching and ashing results. The machine's combination of advanced design features, easy setup and operation, and excellent repeatability and safety, make it the perfect choice for any laboratory.
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