Used PLASMATHERM / UNAXIS 790 #9157170 for sale

PLASMATHERM / UNAXIS 790
ID: 9157170
Wafer Size: 8"
Vintage: 2000
ICP etcher, 8" Manual load Non-load lock Single chamber Advanced energy RF5S- 500W RF power supply for lower electrode AM5 match work and controller Advanced energy RF10M - 1000W RF power supply for upper electrode AM10 match work and controller Leybold 361C turbo pump with 150/360 controller HP 919 Hot Cathode Ion gauge controller (6) MFCs, He backside wafer cooling, Clamp style chuck 2000 vintage.
PLASMATHERM / UNAXIS 790 is an advanced etcher/asher that is designed for high-precision etching applications. This innovative tool utilizes state-of-the-art technologies to deliver superior performance with reliable quality. Its powerful plasma generator is capable of delivering up to UNAXIS 790 W of plasma power, with variable beam trajectories, making it ideal for etching diverse materials and substrates with a wide range of adhesion properties. The machine is equipped with a PC-controlled process management software that can program process cycles, set output parameters, and monitor equipment performance. Additionally, the software allows the operator to accurately control the chamber temperature with its precise gas introduction. It features a highly flexible design that permits a wide range of process parameters and substrate configurations. PLASMATHERM 790 has a 25 liter chamber capacity, a 5 Kg charge capacity, and a tower-type work zone with a capacity of reaching temperatures up to 400°C. It is also equipped with an advanced non-contact control system that monitors the necessary parameter technology and process. This etcher/asher also comes with dual pulse and reactive ion etching process control that provide an unmatched degree of precision for chemical etching, deposition, and etching applications. Additionally, the highly automated machine features a number of automated systems such as plasma activation and auto gas purity monitoring. 790 has a variety of user-friendly accessories available such as a touch-screen operator panel, a digital microscope, and an automated defect inspection unit. These add-ons provide complete process control and superior machine performance. Additionally, the unit is supported by a comprehensive service and support package that includes 24/7 remote diagnostics, maintenance, and online help. This ensures that the unit is operating at peak performance at all times. PLASMATHERM / UNAXIS 790 is the perfect tool for etching and ashing a wide range of materials. Its advanced features, robust construction, and user-friendly design make it ideal for any etching or ashing job, whether it is done on a large scale or a small research project.
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