Used PLASMATHERM / UNAXIS Batchtop VII #9123993 for sale
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ID: 9123993
Wafer Size: 6"
Vintage: 1994
PECVD system, 6"
Table top RIE
Operating software: Windows
Lower electrode RIE, 6"
Advanced Energy RFPP-RF5S (500 W-13.56 MHz)
RF Power supply with AM5 Matchbox and tunner
(3) Mass flow controls
208 V, 60 Hz
1994 vintage.
PLASMATHERM / UNAXIS Batchtop VII is an advanced etcher and asher that is uniquely designed to deliver precise and reliable processing performance for a wide range of materials. This etcher and asher is capable of processing all materials, including: metals, polymers, ceramic, and quartz, as well as more complex multi-directive etches. Through the various computer-controlled processes, this machine is able to accurately etch precise features onto a variety of substrates and parts. UNAXIS Batchtop VII uses plasma or reactive ion etching (RIE) to etch patterned layers and features onto substrates. For maximum precision, the machine utilizes a dielectric plasma which maintains low pressure, high uniformity, high process rates, and high selectivity. This ensures that precisely etched layers are uniform and highly detailed. The machine is designed for maximum flexibility and adaptability. It is easily configurable and can be customized to suit the needs and preferences of any user. PLASMATHERM Batchtop VII is equipped with quick-release components, allowing for easy maintenance and repair. The machine also supports multiple recipe management, allowing for easy commutation between etch recipes. Batchtop VII includes safety features that ensure safe and secure operation of the etcher and asher. This machine is designed to be ESD safe and includes a built-in ionizing fan to help reduce contamination. The machine also includes an interlock system that ensures correct operation of the chamber and offers complete protection against plasma-generated fields. Furthermore, the machine is equipped with a predictive maintenance system that alerts users when a problem arises. The machine has built-in sensors that monitor the process and can be used to troubleshoot problems. Additionally, PLASMATHERM / UNAXIS Batchtop VII is equipped with a real-time process traceability feature that allows users to review the etching history of each job. Overall, UNAXIS Batchtop VII is an incredibly advanced etcher and asher, designed to provide precise and reliable etching and ashing performance. This machine is capable of etching a variety of materials, and its flexible design allows for easy maintenance and customization. The machine also includes a variety of safety features and predictive maintenance systems, ensuring safe and secure operation.
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