Used PLASMATHERM / UNAXIS SLR 720 #9201916 for sale

PLASMATHERM / UNAXIS SLR 720 is an advanced plasma etching and ashing system used in semiconductor manufacturing. It is capable of performing dry etching to produce features on the nanometer scale while maintaining good process repeatability and production yields. The etcher/asher has its own high-end controller and is equipped with a 30-inch plasma source, allowing for a maximum etching capacity of 20w/cm2. It is powered by a high-performance, multi-tasking, vacuum system, with the capability to rapidly switch etching parameters while maintaining a stable process environment. Its advanced etching technology enables precise control of the etch process down to a sub-nanometer resolution. The unit features an intuitive user-friendly graphical user interface (GUI) with real-time process information delivery. With its self-monitoring system, UNAXIS SLR 720 can detect and adjust process conditions in real-time. It offers advanced process optimization by tuning parameters in fields such as ion energy, gas pressure, and cooling. The etcher/asher has built-in diagnostics and status monitoring systems, which can detect possible problems and guarantee high-quality of the end product in a timely manner. It is equipped with anti-contamination and built-in safety systems to ensure safe operation of the equipment. The unit has a wide process window and can be used for etching and ashing of dielectrics, gallium arsenide, silicon, metals, polyimides and other materials at temperatures up to 500ºC. Its automated processes allow for substrate compatibility and uniform material removal, without damage to substrates. It has the versatility to produce deep trenches, etched patterns, micro-vias and device features as small as 0.25 microns. In conclusion, PLASMATHERM SLR 720 is an advanced etcher/asher capable of producing high-quality and reliable parts at nanometer resolutions. With its intuitive user interface, automated processes, built-in safety and diagnostic systems, it can provide users with reliable results in both time and cost-efficient manners.