Used PLASMATHERM / UNAXIS SLR 720 #9270532 for sale
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PLASMATHERM / UNAXIS SLR 720 is an advanced etcher/asher equipment, capable of precision patterning on a wide range of substrates. This system uses advanced ion beam and plasma technology to achieve high accuracy etching and ashing in a wide range of materials, including metals, polymers, and ceramics. UNAXIS SLR 720 makes use of a mixed-gas process to optimize etching rates, while minimizing contamination and deposition of unwanted materials. PLASMATHERM SLR 720 is designed to accommodate substrates up to 7 inches in diameter, and can perform batch etching for multiple parts with a simple load lock chamber change. The unit includes a patented tilt stage design allowing for photolithography to be used to direct etching in various layers of the substrate. This allows for the etching of complex patterns and structures with greater precision and accuracy than other systems. The machine also offers a range of features to ensure a consistent process. The process chamber features active pressure control, allowing precise pressure adjustments to be made to accommodate varying etch rates and substrates. It also includes vacuum pumps for increased etch rate and more uniform etching of patterns in various materials. The tool also has an in-line temperature and gas flow control, enabling accurate process control and substrate analysis. SLR 720 also provides a suite of automated data acquisition features, and an integrated software asset for easy data management and analysis. This allows users to easily capture and analyze process results, identify errors, and ensure repeatability of results. The software also includes features to help users automate their process and optimize etch parameters for specific substrates and applications. In addition to its etcher/asher capabilities, PLASMATHERM / UNAXIS SLR 720 also includes advanced model control to facilitate a variety of diagnostic functions. This includes substrate characterization, temperature profiling, and threshold analysis. This allows users to identify issues within the process and take corrective action before quality issues arise. Overall, UNAXIS SLR 720 is an advanced etcher/asher equipment capable of performing reliable and precise patterning in a variety of materials. Its integrated software and advanced control features allow users to easily monitor the process and ensure repeatability of results. This system is an ideal solution for a wide range of applications, ranging from research to production.
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