Used PLASMATHERM / UNAXIS SLR 720 #9270613 for sale

PLASMATHERM / UNAXIS SLR 720
ID: 9270613
Wafer Size: 8"
Reactive Ion Etcher (RIE), 8".
PLASMATHERM / UNAXIS SLR 720 is an etcher/asher designed for users with a need for high-yield throughput and superior process performance. UNAXIS SLR 720 offers superior performance, enabling users to achieve superior yields while maximizing throughput. PLASMATHERM SLR 720 features patented remote plasma source technology, providing enhanced process capabilities and high-precision controls. SLR 720 is also well-suited for low-k applications as it offers increased selectivity. PLASMATHERM / UNAXIS SLR 720's plasma source offers advanced etching capabilities and superior bi-directional control, enabling users to tune their process to their exact application needs. It features an on board, high-powered 10 Watt RF generator that provides high-performance, stable etching. The RF generator's 0-150kHz total range allows users to fine tune their processes for the best results, ensuring superior etch uniformity and surface finishes. UNAXIS SLR 720 also provides exceptional coating capabilities with its patented spray/spin application. The spray/spin application provides excellent coverage and uniformity, enabling users to achieve uniform coating thinness and uniformity of inert atmospheres across the substrate. It also offers a choice of AR coated or chlorine baked plates, allowing users to choose the optimal selection of applications providing optimal results. PLASMATHERM SLR 720 also features an advanced O2-ion bombardment feature, enabling users to achieve excellent etch selectivity and etch speed. The O2-ions bombardment also helps to reduce the defect density, improving process stability and yield. SLR 720 is also compatible with a range of standard substrates, such as quartz and sapphire. PLASMATHERM / UNAXIS SLR 720 has been designed with the user in mind, offering a range of flexibility for users with a variety of process requirements. It is designed for ease of use, with an intuitive user interface that allows users to quickly setup, configure and monitor their processes. UNAXIS SLR 720's advanced diagnostics and analysis tools help users identify process problems and pinpoint possible areas of improvement. PLASMATHERM SLR 720 is an excellent choice for users looking for a high-yielding etcher/asher that can yield the highest quality results with exceptional process performance. With its range of advanced features, users are able to fine-tune processes to their exact application needs, enabling them to optimize their yields, quality and productivity.
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