Used PLASMATHERM / UNAXIS SLR 720 #9270614 for sale

PLASMATHERM / UNAXIS SLR 720 is an industry leading, advanced etching and ashing equipment designed for a broad range of plasma-based wafer processing applications. Its features make it suitable for both R&D and production use. UNAXIS SLR 720 has a large chamber size of 11" (270mm) in diameter and is capable of processing full-size 300mm wafers. The construction consists of ultra-high and low-pressure plasma zones, which are isolated and independent, allowing for higher process flexibility. The system includes a full-length substrate heating unit that ensures etch and ash uniformity at the lowest possible temperature. The chamber is equipped with an end-point detection (EPD) unit to sense process completion. The high pressure zone of the machine has a power levels that reach up to 1000W. It has digital floating power control with Auto Frequency Tuning (AFT) that helps maintain process accuracy and repeatability. It also includes adjustable RF tuning points that enhance uniformity and repeatability. The tool is also capable of in-situ pressure monitoring to ensure high process stability and consistency between runs. The low pressure zone, on the other hand, has a peak power of up to 300W and has two independent gas lines with fluidic control. The gas composition and delivery of up to four precursors can be individually controlled in real-time. The low pressure etch chemistry is unique in its ability to etch dry and is applicable for a number of processes including resist stripper, etchback, and thickness control processes. A remote-controlled leak valve is included to ensure safety during operation. PLASMATHERM SLR 720 also provides features to help users monitor critical wafer characteristics of their etch and ash processes. It monitors temperature, plasma exposure, RF power, and pressure of the chamber. Additionally, it has an Endpoint Detection (EPD) feature that signals the completion of the task and prevents over-processing of wafers. SLR 720 etcher / asher is an industry-leading asset that combines robustness, flexibility, and precision. This all-in-one tool can be used for a variety of applications, providing superior efficiency and performance. With its ease of use and high-level of accuracy and precision, PLASMATHERM / UNAXIS SLR 720 is an excellent choice for anyone looking to create high-quality, reliable wafer products.