Used PLASMATHERM / UNAXIS SLR 730 #293660356 for sale

PLASMATHERM / UNAXIS SLR 730 etcher/asher is a highly precise and powerful production tool for etching and ashing of silicon wafers for the semiconductor industry. It is equipped with a newly designed 8-chamber process chamber and a large process area for the best etching and ashing performance from production line process recipes. It provides more efficient process results for bulk production in high vacuum and low pressure, as well as the best uniformity and reproducibility. UNAXIS SLR 730 is equipped with a reliable RF generator that ensures precise and robust etching with uniformity in terms of depth, profile, and surface finish. It is capable of etching on wafers with sizes of up to 300mm in diameter with high-resolution and repeatable processes, thanks to its advanced linear motion system and tuned-in frequencies. The state-of-the-art computer-controlled, automatic tuning control ensures uniformity between all cavities and etching time. Moreover, PLASMATHERM SLR 730 uses a unique gas delivery system that helps to ensure optimum gas flow for etching uniformity. This system helps provide homogeneous gas distribution from all chambers and a uniform flow rate to the chamber, leading to an improved gas utilization efficiency in high vacuum and a clean process process. Additionally, SLR 730 is constructed with modular interfacing and parts, such as chambers, filter tubes, supporting structures, conveyor, and vacuum and gas delivery lines. It also incorporates a modular programmable logic controller (PLC) that handles time-critical process control and sensing, and provides dynamic display, parameter adjustment, and traceability mechanisms. To ensure the highest reliability and safety, PLASMATHERM / UNAXIS SLR 730 etcher/asher is designed with a stainless steel interior and exterior, built-in redundancies in critical functional components for failure safety, flanges with gaskets, electronic key locks, leak detectors, and temperature sensors. It also complies with all applicable safety and health regulations and standards.