Used PLASMATHERM / UNAXIS SLR 740 #9284674 for sale

PLASMATHERM / UNAXIS SLR 740 is an advanced etcher/asher which is designed for ultra-precision plasma etching and ashing of both slabs and wafers in MEMS and micro-fabrication applications. It is able to produce patterns with a minimum of 0.2 μm scale features, while providing superior repeatability over abrasive methods. The equipment is engineered with a pulsed direct-current plasma source combined with high-resolution pressure differential system to create and maintain a differential pressure region near the surface to be etched and ashed. This allows better control of the plasma sheath and lower temperature etching/ashing of materials. UNAXIS SLR 740 also includes a multi-stage plasma etching/ashing technology for greater process control and improved quality. The unit's advanced features include a high precision and repeatable high-solids RF generator to ensure consistent and reliable etching, ashing and imaging with low cost-per-feature. Additionally, the machine is equipped with a dedicated continuous flow-gas delivery module for use with multiple gas sets. This is ideal for applications requiring low-temperature etching/ashing, and will ensure consistent and accurate plasma results. The tool also includes Vector Plus control and compliance software which provides unlimited recipes and recipes security, and an intelligent, user-friendly graphical interface for monitoring and logging all process-related parameters. The asset is also compatible with a range of UNAXIS and nonPLASMATHERM automated handling systems and vacuum technologies for increased flexibility and faster tool utilization. With the ability to etch/ash a wide range of materials including silicon, sapphire, polysilicon and aluminum, and to produce a minimum feature size of 0.2 μm or lower, PLASMATHERM SLR 740 is an intelligent choice for all your MEMS and micro-fabrication applications.