Used PLASMATHERM / UNAXIS SLR #9262446 for sale

PLASMATHERM / UNAXIS SLR is an advanced etcher/asher specifically designed for high cleanliness, high performance etching and ashing of advanced materials including Si, GaAs, SOI, GaN, RTP and PECVD. This tool features a novel design single RF power supply that improves etching uniformity, contributes to superior overetch prevention and helps ensure excellent process stability. The single RF pump also reduces the thermal budget of each heater, enabling shorter etch times. The software package that comes with this machine provides control of all RF power parameters, from source power and power level control to pulse time control and chamber stability. The sampling camera equipment used for plasma monitoring allows in-situ process optimization with precise non-destructive process monitoring. The control system also allows for a wide range of new and innovative process systems by allowing setup and modification of process recipes. The tool is additionally fitted with a power unit based on microwave technology to further increase precision and process control flexibility. In addition, a cryogenic cooling machine is available as an option, allowing for process temperatures near -100°C for some materials. Furthermore, the tool is installed with various vacuum systems to reduce process contamination and improve etch uniformity. UNAXIS SLR has an advanced self-correcting end-point detection tool, preventing overetching and ensuring repeatability. The standard process chamber on the machine has a 75.4mm x 102mm usable window area for etching and a 15.2 liter etch volume. An additional upgrade using a ceramicliner upgrade can increase the usable window area by 43.4% and the etch volume by 50%. PLASMATHERM SLR is an ideal tool for the fabrication of advanced devices and is a great option for process engineers looking for a tool that provides excellent etching uniformity, stable processes, and state-of-the-art monitoring systems.