Used PLASMATHERM / UNAXIS Versalock 700 #9311007 for sale
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ID: 9311007
Wafer Size: 4"
Vintage: 2000
PECVD System, 4"
(2) Process chamber
Load lock
Wafer handler
PM1:
For HDCVD
Gases: SiH4, N2, NH3, N2, O2, Ar, SF6
Wafer type: Mechanically clamped wafers
PM2:
For PECVD
Gases: SiH4, N2O, NH3, N2, CH4, He, SF6
Wafer type: Electrostatic chuck
Removed parts:
PM1:
Roots blower package
Gas box exhaust switch
NESLAB Chiller
Vacuum tees
He MFC for wafer backside
ENI (Bias) RF Generator
ICP RF Match network
RF Cables
Match position controllers
PM2:
Roots blower package
Air regulator assembly
Gas box exhaust switch
NESLAB Chiller
PM7 Controller
RF5S RF Generator
Waterflow sensor
RF Feedthrough
N2O MFC (PM2)
RF Cables
Match position controllers
Missing parts:
Capacitor housing for ICP
BROOKS AUTOMATION Robot for wafer handler
2000 vintage.
PLASMATHERM / UNAXIS Versalock 700 is an etcher and asher designed for precision and high-rate etching applications. It is designed to provide users with superior quality, accuracy and repeatability. UNAXIS Versalock 700 is an industrial-grade etcher and asher equipment that allows for fast etch rates, with speeds up to 28 nm/min., for process acceleration. PLASMATHERM VERSA LOCK 700 is an automated, modular, and configurable system, which is equipped with multiple zones for flexibility and performance. It is designed to provide unparalleled accuracy and repeatability with precision vacuum and gas sequencing, thermal control, and process profile optimization. PLASMATHERM / UNAXIS VERSA LOCK 700 features ultra-high-resolution imaging and positioning for superior alignment and repeatability, and a high-rate al./Cu etching process for superior selectivity and etch rates. It is also equipped with an advanced infrared CCD camera unit for closed-loop monitoring and process optimization, and multiple tool zones for high-performance etching, cleaning, photomask awareness, and O2 etch. PLASMATHERM Versalock 700 is also equipped with an efficient, ergonomic design that allows for user efficiency and sorter product throughout. It is designed for seamless integration into existing systems, with comprehensive monitoring capabilities and troubleshooting tools. It is built with a temperature controlled quartz chamber, enabling precise control over process temperatures. Versalock 700 features a variable pressure source, enabling superior process control and reproducibility of results over a wide range of assemblies. Overall, UNAXIS VERSA LOCK 700 is a high-performance etcher and asher machine designed for accuracy, repeatability, and superior quality performance. It is equipped with numerous features designed to meet the most demanding etch and ashing applications, and is highly configurable and modular, providing superior precision and productivity.
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