Used PLASMATHERM / UNAXIS VLR 700 #9075710 for sale
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ID: 9075710
Wafer Size: 8"
ICP System, 8"
Single chamber
Front end
Robot
ICP Process module
Equipped with ICP source
(8) Gas channels
Transfer module: HINE 4.5 robot
Load module: Dual cassette platform, 8"
PLASMATHERM Design
Wafer mapping sensors
Mag lev turbo
Turbo controller
Process baratron.
PLASMATHERM / UNAXIS VLR 700 is a state-of-the-art etcher/asher designed to quickly and accurately micromachine difficult materials with high precision. It is the most advanced product in its class, featuring a range of advanced etcher/asher technologies, including a linear drive system, a powerful vacuum chamber, and a durable, low-temperature plasma head. The linear drive system allows for smooth operation and fast, accurate machining. It is designed to eliminate warping and misalignments due to thermal expansion, ensuring reliable operation even with extremely sensitive materials. The high-precision vacuum chamber provides excellent process control and repeatability, adjustable gasflow, and adjustable pressure levels. This ensures uniform etching and ashing, with a minimum of material waste. The Plasma Head offers consistent temperature control for both low- and high-temperature processes. It features a self-aligning nozzle for precise delivery of reactive gases, and precision feedback control to ensure that each process is optimally set up for maximum accuracy. Additionally, the Plasma Head is designed to minimize contamination, extending the life of the tool and ensuring pristine results. With a large range of compatible chamber materials, UNAXIS VLR 700 is suitable for a variety of etching and ashing processes, allowing users to achieve exceptional precision micromachining. It features adjustable recipe parameters and software automation, making it ideal for both prototype production and high-volume operation. The tool is also designed for simple operation and maintenance, allowing users to quickly and easily carry out maintenance. Overall, PLASMATHERM VLR 700 is an advanced etcher/asher that offers users unparalleled performance and precision. It offers a wide range of features and capabilities, such as a linear drive system, powerful vacuum chamber, precision plasma head, adjustable recipe parameters, and software automation that make it suitable for a variety of tasks. It is designed for simple operation and maintenance, and is capable of achieving high accuracy and repeatability with minimal waste.
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