Used PLASMATHERM / UNAXIS VLR 700 #9272287 for sale

PLASMATHERM / UNAXIS VLR 700
ID: 9272287
ICP System LM Module TM Module Capable of (3) PM modules.
PLASMATHERM / UNAXIS VLR 700 is a vacuum-based etcher/asher designed for use in microfabrication processes. It is commonly used to etch and deposit thin films of materials on substrates at high rates of precision and repeatability. The equipment is based on a vacuum-locking reactor chamber, which enables a seamless integration with any process. UNAXIS VLR 700 is composed of three main components: vacuum chamber, process chamber and vacuum lock. The vacuum chamber supports a programmable sample tray and process chamber, which can be customized for different applications. The sample tray is held in place by adjustable magnets, which aid in sample placement and process control. The process chamber is equipped with a highly sensitive temperature control system, a radiation shield, and a substrate holder. The vacuum lock ensures maximum air-tightness by using balanced door seals and multiple port valves. It also serves as the entrance and exit path for materials entering or leaving the chamber. PLASMATHERM VLR 700's advanced process technology allows experts to etch, deposit, and pattern metal, oxide, and semiconductor materials at high rates of accuracy and repeatability. The unit features an integrated process chamber and vacuum machine, which ensures all process operations are controlled and monitored with maximum precision and parameters. The digital controller allows for customizable process parameters, allowing for accurate, repeatable results. VLR 700's design offers superior air-tightness and excellent chemical resistance, making it the perfect choice for vacuum-based applications. The tool's high temperature tolerance (up to 850°C) allows for etching of high-temperature materials. In addition, PLASMATHERM / UNAXIS VLR 700 is equipped with a custom-made software package, which provides easy access to all parameter settings, process data, and performance data, making it easy to set up and monitor the process. Overall, UNAXIS VLR 700 asset is a reliable and versatile etcher/asher, ideal for applications ranging from semiconductor engineering to microfabrication. With its advanced process technology, high temperature tolerance, and reliable seal, PLASMATHERM VLR 700 is an ideal choice for those looking for a reliable etcher/asher.
There are no reviews yet