Used PLASMATHERM Versaline #293602359 for sale

PLASMATHERM Versaline is a sophisticated etcher/asher designed with precision and advanced engineering to deliver powerful etching and ashing performance. Equipped with a modern, proprietary in-situ plasma, Versaline enables the highest levels of etching and ashing accuracy and repeatability. Its flexibility allows for the rapid processing of different wafer materials and sizes, automatically varying gas flow, pressure, and plasma igniting parameters to ensure high process quality. PLASMATHERM Versaline's advanced features and controls allow users to micrometerize and tune both etch/ash area and depth on a wide variety of materials, as well as high-aspect ratio mesa etching. Working with oxygen or chlorine, the etcher/asher is ideal for many materials types, including silicon, germanium, silica and glass, GaAs, silicon nitride and polycrystalline diamond. Comprised of a BCD (Base Configuration Device) console, an integrated hardware platform, and an engraved port faceplate, Versaline utilizes advanced process control techniques to provide ventilation, inert or oxidizing atmosphere, a large plasma array and gas control. In addition, the system's ion-enoch systems, heated susceptor and integrated E-gun systems work together to optimize process differentiation and ensure minimal contamination. Thanks to its Flexible Modular Control (FMC) technology, PLASMATHERM Versaline achieves uniformity and stability of etching and ashing parameters, as well as real time monitoring and process control. The systems also have built-in vibrating alert system to notify of any abnormal situations so that the process can be corrected quickly. With a large selection of transfer modules, Versaline offers highly flexible implementation of recipes, efficient sample handling and the ability to combine different process components, such as isotropic etching, Reactive Ion Etching (RIE), dual-frequency dielectric etching, isolation etching and more. The etcher/asher also supports wafer transport with automated handlers to allow for fabrication of up to eight wafers per batch. All in all, PLASMATHERM Versaline is a powerful and innovative etcher/asher that enables reliable repeatable performance and precise control. With its extensive features, Versaline offers superior capability that ensure superior process quality and capacity for a wide array of applications.