Used PLASMATHERM Versaline #293621803 for sale
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ID: 293621803
Vintage: 2014
ICP-RIE System
Missing parts:
Valves
Elevators
Power supplies
Generators
Pumps
2014 vintage.
PLASMATHERM Versaline etcher/asher is an advanced plasma etch and ash equipment engineered to provide exceptional parts etching, wafer cleaning and surface processing capabilities. This system is comprised of modular components that can be customized to meet specific needs and trends in the etching/ash solution industry. Versaline's process chamber is made up of 304 stainless steel and a PFA liner. This etcher/asher is vacuum-sealed, gas-tight and acid-resistant to ensure a reliable and safe operation. A powerful electric field generator creates a plasma in the process chamber in either oxygen or nitrogen atmosphere with varying operating temperatures and pressure levels. This plasma enables PLASMATHERM Versaline to etch complicated shapes, recesses and patterns on metal, alloy, ceramic and semi-conductors with high precision and repeatability. The etching process is usually carried out by a series of chemical processes such as etching with organic solvents, wet oxidation, and reactive ion etching (RIE). This unit offers two distinct etching techniques, namely "wet chemical etching" and "reactive ion etching". Furthermore, Versaline also features a combined wet and dry etching process which is beneficial in the preparation of industrial components. This etcher/asher is resistant to both chemical and mechanical contaminants and can be used in a variety of applications, including chemical mechanical polishing (CMP) and plasma processing. PLASMATHERM Versaline also delivers excellent surface preparation performance, due to a combination of factors such as its high sensitivity, high precision and its ability to precisely and repeatably control the etching speed and depth. Overall, Versaline etcher/asher is an advanced and reliable machine designed to meet advanced etching/ash solution needs. It offers versatile etching and ash capabilities, in addition to chemical mechanical polishing and plasma processing capabilities, with exceptional precision and repeatability.
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