Used PLASMATHERM Versaline #293623685 for sale
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ID: 293623685
Vintage: 2011
Deep silicon etcher
PM1 Chamber
PDC
(2) Pumps
2011 vintage.
PLASMATHERM Versaline is a versatile etching and ashing etching equipment designed to meet the needs of the laboratory and industry professionals. Versaline combines the reliable, repeatable, high-precision etching and ashing process necessary for a quality etching with the innovative design and closed-loop process control features needed for commercial production. PLASMATHERM Versaline features a 13-inch, high-contrast LCD touch-screen display for easy operation and a modular design that supports up to eight workstations to maximize production throughput. The Multi-Gas Control (MGC) system gives users the flexibility to select between inert and reactive gases to meet the specific process requirements. With Versaline's comprehensive production monitoring and tracking unit, users can accurately monitor and control every aspect of the etching and ashing process from start to finish. PLASMATHERM Versaline is powered by a two-stage inductively-coupled plasma (ICP) source for optimal etching and ashing performance. Versaline utilizes state-of-the-art digital power supplies for delivering up to 3,000 watts of power for superior control over the etching and ashing process. PLASMATHERM Versaline's finely adjustable electro-mechanical motion machine ensures precise positioning of the wafer. Versaline offers a variety of working chamber geometries with uniform plasma density for high-throughput production and uniform etching/ashing results. PLASMATHERM Versaline is designed with a stainless steel chamber to ensure quality etching and ashing results. The process chemistries Versaline is capable of handling include but are not limited to noble gases, halides and rare earth compounds. The chamber covers are designed to contain etching fumes and particulate matter, minimizing contamination of previously etched wafers. PLASMATHERM Versaline has versatile and high-performance options available as well. Versaline's integrated control tool allows users to customize process recipes and recall them for future runs. The on-board analyzer can monitor the chamber's gas composition during the etching and ashing process for optimal process control. PLASMATHERM Versaline also features a process monitoring module with built-in diagnostic and analysis functions to ensure quality results and maximize process consistency. Versaline is an innovative etching and ashing etching asset designed to meet the requirements of any laboratory or industrial production environment. PLASMATHERM Versaline's advanced operating model, precision process control and modular design make it an ideal choice for reliable, repeatable and accurate etching and ashing results.
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