Used PLASMATHERM Versaline #9254667 for sale
URL successfully copied!
Tap to zoom
ID: 9254667
Wafer Size: 3"-8"
Vintage: 2011
CVD System, 3"-8"
(3) Chambers
(2) PECVD Chambers
HDP-CVD Chamber
(3) Power modules
BROOKS AUTOMATION MX 600 Handler station
2011 vintage.
PLASMATHERM Versaline is an advanced etcher / asher machine designed for a wide variety of applications in the semiconductor production and research industries. It is suitable for both batch and single wafer applications, and its compact size makes it a great choice for labs with limited space. Versaline offers exceptional precision and flexibility, giving users access to many different etching and ashing techniques. It includes a range of specialized features, such as a multi-stage etching process, overpressure protection, uniformity control, and an automatic cleaning mode. The machine also features a modern control equipment that supports multiple software packages, allowing it to be used in a variety of settings. Unlike most ashing systems, PLASMATHERM Versaline is designed to operate in a completely sealed chamber. This innovative vacuum seal technology helps eliminate particles and gases that could contaminate the vessel, improving the quality of the outputs. The system has a powerful process section that offers users a wide range of options to help them achieve their desired results. It is equipped with a gas supply and exhaust unit, along with a variety of heating capabilities. This enables the user to control a number of parameters, including pressure, flow rate, and temperature, with incredible accuracy. When combined with its rotating stage, this makes it ideal for etching and ashing with a range of substrates. Thanks to its advanced software suite, Versaline can be easily integrated with other systems to form a seamless production line. Furthermore, with its clear maintenance mode, monitoring and maintenance procedures can be conveniently carried out from within the control machine. This helps users to quickly identify anomalies and correct them before there is any damage to the tool or the substrates. All things considered, PLASMATHERM Versaline is an ideal choice for those looking for a highly reliable and accurate etching and ashing machine. Its unique features and straightforward operation give it an edge over most of its competitors, making it well worth considering for any lab.
There are no reviews yet