Used PLASMATHERM Versalock 700 #293729350 for sale
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ID: 293729350
Wafer Size: 6"
Vintage: 1998
Reactive Ion Etcher (RIE), 4"
Dual chamber
(2) NESLAB Chillers
(3) EDWARDS iQDP80 Pumps
Process module: CF4 / N2 / CHF3 / AR / SF6 / O2
RF1, RF2 (RFPP RF5S)
Loadlock
Handler
VAT gate valve
Transfer robot
Throttle valve
Manuals
Cortex computer and software
Operating system: Windows 10
1998 vintage.
PLASMATHERM Versalock 700 is a high-performance, ceramic-based, thermal, etching/ashing machine designed for metal etching and glass etching applications. This machine has a maximum temperature range of up to 700°C and is specifically engineered for a range of etching and ashing applications, such as ultra-precision subtractive processes and wafer maintenance. This machine offers excellent accuracy and repeatability for ultra-microfabrication processes, such as the production of high-density interconnect (HDI) circuits, ultra-thin devices, and embedded memory structures. Versalock 700 utilizes a closed loop active-controlled equipment, providing a precise and consistent thermal cycle during the etching and ashing process. The active closed-loop system enables the precise temperature control required for the most demanding etching applications. Additionally, the controllability of the heating unit gives repeatable results with a very low temperature coefficient of variance. This low coefficient of variance is necessary for highly precise thermal etching processes. This advanced etching machine is equipped with two independent sections for etching and ashing, each with individualized thermal control. It also has an automatic calibration machine that ensures all heating elements are operating within set tolerances before any process starts. Additionally, PLASMATHERM Versalock 700 is self-monitoring and equipped with an alarm tool that can alert operators of any asset malfunction or other problems. This state-of-the-art etching machine is highly productive and efficient, with a maximum model throughput of 900um/min. The output is controlled and maintained by an advanced onboard PID-type pulse modulation equipment that gives the operator full control of the etching temperature. Furthermore, a built-in thermal cycler enables the precise control of thermal cycles, while also reducing the system's total idle time. The spacious work chamber of Versalock 700 provides ample space for large wafers up to 8-inches. It also features a ceramic locking mechanism between the lid and base that ensures good flushing of the process chamber for optimal heat transfer and consistent etching results. PLASMATHERM Versalock 700 is compact, rugged, and highly reliable, designed for operation in an R&D or production environment. It is compatible with a range of specialty processes and is backed by a one-year warranty. All in all, Versalock 700 is a versatile, high-performance etching/ashing machine that combines the utmost in accuracy and consistency with a high output and user-friendly operation. This machine is the ideal choice for a wide range of demanding etching and ashing processes.
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