Used PLASMATHERM Versalock 700 #9355618 for sale
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ID: 9355618
Wafer Size: 8"
Reactive Ion Etcher (RIE), 8"
LM/TM Module
RIE Module
Cassette to cassette load lock
Robot transfer
LEYBOLD 361C Turbo pump with controller
MKS Throttle valve with controller
ADVANCED ENERGY RF10S 1000 W RF Lower electrode power supply
With match work and tuner
(4) Mass flow controllers.
PLASMATHERM Versalock 700 is a high quality etch/ash tool used for a variety of substrate materials and processes. This precise equipment ensures repeatable accuracy and uniformity when working with various sizes of substrates. It features a unique ergonomic wet bench design, maximizing user comfort while maintaining a safe working environment. Versalock 700 provides a wide process window, allowing for high-fidelity results when etching or ashing. PLASMATHERM proprietary VersaLock™ Mode selection feature allows users to configure the system for multi-mode processing of up to four substrates at once. This ensures a consistent etch/ash across all substrates for improved uniformity and reliability. Using advanced etching technology, PLASMATHERM Versalock 700 is precise and repeatable for production line environments with the ability to keep process parameters consistent and uniform. Its highly adaptive process control capability enables the unit to provide maximum throughput and precision while delivering quality results. Versalock 700 also offers a wide variety of accessories designed to tailor the etch/ash process to specific applications. This includes sample holders, sample racks, process monitoring sensors, and mass flow controllers. It also has an optional ultra-low pressure etch which is ideal for fine features and delicate substrate materials. PLASMATHERM Versalock 700 also features a comprehensive safety machine to protect users from harm. This includes a built in dry cabinet which prevents the escape of heated gases, a thermal cut out tool to prevent overheating, and pressure interlocks that are designed to be released when pressure levels exceed a predetermined limit. In conclusion, Versalock 700 is an advanced etch/ash tool that offers precise, repeatable results for a variety of substrate materials and processes. With its wide window of process parameters, it enables the user to tailor the etch/ash process to specific applications. It also features an extensive safety asset to protect users from risk and harm.
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