Used PLASMATHERM Versalock 700 #9355619 for sale

ID: 9355619
Wafer Size: 8"
PECVD System, 8" LM/TM Module Cassette to cassette load lock Robot transfer (6) Zones WATLOW Chamber heat controller ADVANCED ENERGY RF5S 500 W RF Lower electrode power supply With match work and tuner (4) Mass flow controllers.
PLASMATHERM Versalock 700 is a state-of-the-art etcher/asher for precise material processing. It utilizes the latest technology to extend the life of any project, from ultrafine metal traces to large-scale prototypes. Versalock 700 offers the versatility and power required for both materials science and research and industrial applications. PLASMATHERM Versalock 700 has an advanced ergonomically designed control panel that presents a functional, easy-to-use, and intuitive user experience. The precise 2.8" LCD color touchscreen allows users to quickly and accurately configure and save jobs to prevent degradation of features. The standard memory capacity of 382 MB combined with the large graphics LCD can store up to 40 process programs with no extra hardware needed. The advanced chemistries present numerous etching and abrasive cleaning capabilities. A wide array of wet chemical etching and ashing options is available, including powder blasting and etching. As with all PLASMATHERM systems, customizable clean-up options such as sonication, automated wafer transfer, and extended robot operation are available. With the ability to etch or burn away unwanted material with the press of a button, Versalock 700 is an ideal choice for efficient operations. At its core, PLASMATHERM Versalock 700 is equipped with two buses that feature gate electrodes to minimize damage to substrates and features on the wafer surface. Each of these buses is equipped with 3-Axis robots to precisely deposit and coordinate each target wafer. The robots also feature an isolation range of up to +1" away from the substrate, ensuring zero contamination from outside sources. In addition, Versalock 700 can be programmed to switch between high current and standard power supply configuration in order to increase process efficiency. PLASMATHERM Versalock 700 is housed in a Class 10 cleanroom, allowing for a thoroughly enclosed, contaminant-free work environment. The equipment is equipped with an integrated diode laser to evenly affect only the targeted material, eliminating the need for additional power supplies. Additionally, Versalock 700 eliminates the time and cost associated with exchanging gases on the etch system with its automated gas delivery unit. For an efficient etching/abling machine with numerous customizable options, PLASMATHERM Versalock 700 is the superior choice. Its intuitive design and easy-to-use features make it the ideal choice for any etching or ablation job.
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