Used PLASMATHERM VLN - Versaline #9124972 for sale
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ID: 9124972
Vintage: 2005
ICP Etcher
Manual load lock - four wafer transfer
(RF1)ENI ACG-6B RF 500W - 13.56MHz power supply with a seren AT6NVL match work - MC2 controller
(RF2) ENI GMW-25A 2500W - 2.00MHz with seren AT25NVL match work - MC2 controller
Seiko seiki 1303CV turbo pump and SCU 700 controller
Inter cal gate valve
Edwards scroll roughing pump
(6) Mass flow controller/gas lines with isolation
Process and bypass valves
He backside cooling
Watlow chamber heaters and controllers
Jorin yvon endpoint
Plasmatherm windows based OS
208V, 3 Phase, 50/60 Hz
2005 vintage.
PLASMATHERM VLN - Versaline etcher/asher is a precision controlled wafer processing machine designed to etch/ash various types of materials including wafers, metal, and silicon substrates. The machine utilizes a plasma source coupled with high levels of control and accuracy to provide superior etching/ashing results. The Versaline's key capabilities include high-precision controls, fast plasma etching/ashing, and sophisticated process control features, which allow for challenging wafer processing. The machine utilizes a 100MHz RF generator to generate up to 900 Watts of RF power for optimal wafer etching/ashing. The machine's 12-zone etch/ash chamber has a wide range of motion and can precisely control etch/ash parameters including temperature for optimal processing purity. Each zone has its own independent process control and pressure control systems to ensure precise results. The machine also features a 12-zone bake station to pre-treat the wafers before etching/ashing, allowing users to achieve better uniformity and process repeatability. The Bake station is equipped with its own independent temperature and pressure control systems for greater precision and better results. The Versaline etch/ash chamber is made of high-quality aluminum with a welded construction, providing rigidity, durability, and superior process performance. It also features a programmable user interface that allows for simple and effective programming of the etch/ash parameters. Additionally, the user interface also helps track process history and monitor performance in real time. In conclusion, VLN - Versaline etcher/asher is a precision controlled wafer processing machine designed to deliver superior etching/ashing results quickly and accurately. It features a sophisticated multi-zone etch/ash chamber, a programmable user interface, and a bake station for pre-treating wafers before etching/ashing. With its high-quality construction and advanced features, this machine delivers consistent results and a high level of customer satisfaction.
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