Used PLASMATHERM VLR #9139644 for sale

PLASMATHERM VLR
Manufacturer
PLASMATHERM
Model
VLR
ID: 9139644
Wafer Size: 6"
Vintage: 1998
ICP Bosch system, 6" 1998 vintage.
PLASMATHERM VLR is a state of the art etcher/asher machine capable of meeting the harsh demands of modern industrial processes. VLR is designed to provide precise and repeatable process results while keeping cost and time factors to a minimum. PLASMATHERM VLR's large working chamber measures approximately 63-cubic-feet, and is pressurized to up to 13.3 psig. This allows for a wide range of processes, including high temperature/pressure plasma etching, reactive ion etching (RIE), and ashing. The machine utilizes a two-stage high voltage DC power supply, allowing for pulsed dc and pulse plasma etching sequences. It also has the capability to perform alternating polarity etching, making it more efficient for etching certain materials. VLR is designed to make exacting etching and ashing of any material possible, with close control of etch rates, surface condition, and conductivity. It also features a patented multiple-aperture discharge system for precise control over etching/ashing time and dosage. Additionally, its insulated chamber gas vessel housing also helps to minimize particle contamination. The machine's user interface is intuitive and simple to use, and includes a variety of display options such as graphical displays and numerical data displays. The software is capable of storing up to 10 recipes for easy recall and programming convenience. The machine also has an auto-tuning feature that ensures accurate etching or ashing of any substrate material. PLASMATHERM VLR's safety features are also top-notch, with an emergency stop button on the user interface for quick emergency shut off capability, as well as a fume containment system to capture and safely remove any toxic fumes, particles, or vapors. Overall, VLR etcher/asher is an ideal choice for industrial etching and ashing needs. It is a highly advanced machine that boasts precise etching/ashing capabilities, intuitive user interface, safe operation, and it's versatile enough to meet a variety of etching/ashing needs. Additionally, its compact size and low noise level makes it perfect for operations in any size facility, and its relatively low cost makes it a cost-effective choice for many applications.
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