Used PLASMATHERM VLR #9205771 for sale

PLASMATHERM VLR is a state-of-the-art etcher/asher designed for a variety of applications in the semiconductor, optoelectronic and microelectronics industries. This versatile machine is ideal for deep reactive ion etching (DRIE), plasma asher, and other processes that require precision etching and ashing. The machine is based on a three zone based design, which allows the substrate to be 'pre-treated' in the first zone with gaseous oxygen or activated nitrogen to remove surface contaminants and prevent surface damage. The second zone is designed to adequately sharpen the features that have been etched into the substrate. The third zone provides an inert atmosphere, enabling etching and annealing in the same furnace. This machine is equipped with a microwave generator, which is used to create the plasma field. This provides a much higher level of precision than traditional ashers which utilise RF (radio frequency) technology. The microwave power can be regulated, allowing process rates to be optimised. This also provides an effective safety feature, with failure to detect misalignment of the substrate resulting in immediate shutdown. The machine can also be fitted with an additional lift-off head and base plate, allowing for annealing in a vacuum environment - essential for achieving high levels of homogeneity in nickel and gold. The base plate is also heated directly, allowing for higher level temperature uniformity. VLR is equipped with advanced software, giving users the ability to control and monitor all aspects of the process. It is also compatible with a wide variety of gases, allowing it to be used in many different etching and ashing applications. These features make PLASMATHERM VLR an ideal choice for a variety of industries, allowing users to gain high levels of productivity and efficiency with minimum levels of effort. The machine is also highly reliable, ensuring that processes are predictably repeatable and that quality results are achieved consistently. This ensures that this versatile system is a great choice for achieving high levels of performance and accuracy.