Used PLASMATHERM VLR #9225837 for sale

PLASMATHERM VLR is an advanced dry etching equipment designed for high accuracy micro-machining with the ability to etch complex 3D patterns. The system is based on industry-standard reactive ion etching (RIE) technology, which uses a high voltage plasma to remove target materials from a substrate in a controlled manner. It combines high spectral brightness and high power density to achieve ultra-fast etch rates with very high accuracy and repeatability. VLR consists of an extremely high frequency radio frequency (RF) generator, unit control software, and a vacuum chamber with two separate planar plasma sources. These planar plasma sources, which are connected to the RF generator, provide homogeneous plasma generation, ensuring high accuracy micro-machining of parts with multiple features. PLASMATHERM VLR is tailored for vacuum and reactive gas chemistry on a wide range of materials, including many high-aspect ratio structures. It is designed to support both oxide and non-oxide etching, featuring an adjustable bias voltage on the multi-planar chamber that can achieve high selectivity for different materials. This etch machine is also capable of annealing, passivating, and deposition processes. The tool supports a wide range of power densities, ensuring optimal etching parameters for various geometries. It is equipped with real-time monitoring, enabling precise control over etching process parameters. The software also provides user-friendly interface for recipe development. VLR is designed with a small footprint and makes use of non- corrosive materials, making it easily adaptable to almost any laboratory environment, including cleanrooms. It is also completely self-contained, making installation and routine maintenance easy to perform. Overall, PLASMATHERM VLR is an excellent choice for applications that constantly demand high accuracy and speed. Its unique combination of features makes it the perfect choice for micro-machining demanding projects quickly and accurately, with repeatable results.