Used PLASMATHERM VLR #9225838 for sale

PLASMATHERM VLR is an etching and ashing equipment developed by PLASMATHERM Applied Technology. This versatile machine is designed to accommodate a wide range of substrates, including semiconductors, microelectronics, photovoltaic components, and more. It is suitable for a variety of jobs, from simple to complex, ensuring high quality results. VLR is composed of several components, including an Integrated Gas Console (IGC), Gas Processing Console (GPC), auto-load/unload, and single or multi-chamber process chambers. The IGC includes a digital display for easy operation of the system and gas flow adjustment, allowing precise control of etch/ash recipes. The GPC manages the gas flow and pressure and can store up to 15 etch/ash recipes. The machine utilizes a combination of plasma etching and nitrogen ashing enabled by a proprietary high-density microwave generator. This allows for repeatable results with robust selectivity and sharp resolution, while its carousel allows for fast loading and unloading of the substrates. In addition, the unit's remote diagnostics ability allows for quick detection and remedy of operation anomalies. PLASMATHERM VLR is a sophisticated etcher/asher machine that delivers repeatable results with consistent and reliable performance. Its user-friendly design allows operators to interact with the tool intuitively, and its fast and efficient operations help reduce downtime and increase throughput. The asset is a great choice for semiconductor manufacturers looking for reliable etching and ashing capabilities.