Used PLASMATHERM Waf'r Batch 74 #9050092 for sale

PLASMATHERM Waf'r Batch 74 is an etcher/asher equipment created by Plasma Therm LLC. It is designed for precision etching and ashing of both <200µm and >200µm thick masking layers. The batch system is designed with two gas sources, one for Plasma etching and the other for Ashing. The gas sources are controlled by a custom controller, allowing for single or multiple cycle recipes with multiple pressure control options. The tool features Pyrolytic Graphite (PG) chambers with low magnetic field and a robust heating-cooling unit. The PG provides an optimal vacuum environment and ensures high rates of process uniformity. The heating-cooling machine ensures that the temperature is maintained to within a few degrees Celsius of the setpoint across the wafer. The batch tool features a modular design, allowing for easy upgradation in case of process requirements. It is equipped with a high speed load and unload asset to reduce processing time and an advanced vacuum model for effective vacuum control and process accuracy. It houses a high speed, high resolution encoder to ensure precise wafer positioning and uniform etching and ashing. The software used by the batch equipment is user friendly and provides the user with options to save recipes, have remote access and networking capabilities to supported tools, and generate reports. The batch system also features a number of safety features. These include an emergency stop, interlock unit, power panel and coolant machine. The emergency stop allows operators to stop the tool quickly in case of an emergency. The interlock tool prevents operator errors and incorrect usage. The power panel monitors and controls the asset. Finally, the coolant model helps keep temperatures at safe levels. To sum up, PLASMATHERM Waf'r Batch 74 provides reliable etching and ashing of both <200µm and >200µm thick masking layers, using sophisticated and advanced systems. It is a safe and efficient tool, and makes it easy for operators to manage the etching and ashing process.