Used PLASMATHERM Wafer/Batch 741 #293595646 for sale
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PLASMATHERM Wafer/Batch 741 is a plasma processing etcher/asher designed to offer a variety of applications in the semiconductor industry. It is a high-precision piece of equipment that utilizes a combination of dual frequency plasma sources, high-frequency source for the etch process and a low-frequency source for the ashing stage. This combination allows for a high degree of precision and control over the etch and ash parameters, making it ideal for fine-tuning and optimizing performance for specific applications. PLASMATHERM Wafer/Batch 741 provides a wide range of operating parameters, allowing for tailoring both etching and ash processes to meet customer-specific requirements. This results in improved uniformity and surface quality for etch and ash applications. A specialty of this etcher/asher is its ability to accommodate wafer substrates ranging in size up to 200mm in diameter. In addition, this model has a unique gas introduction system attached to the forward-oriented surface of the etcher chamber, which ensures a homogeneous and uniform flow of process gas in the etch and ash chambers. PLASMATHERM Wafer/Batch 741 features a user-friendly and intuitive interface, which is highly automated and includes numerous process monitoring and diagnostic routines. These routines allow users to monitor temperatures, pressures, and other parameters while controlling the entire etching and ash processes. In addition, the system also integrates an automated fault detection and recovery subsystem that is designed to ensure optimal results at all times. This etching/ash system is an ideal solution for the semiconductor industry providing a cost-effective and reliable tool for both wafer and batch jobs. It simplifies processes, improves yield, and is designed for robust operation. Furthermore, with the judicious use of various materials, PLASMATHERM Wafer/Batch 741 can perform high-quality etching and ashing of polysilicon doped substrates, metals, and dielectrics. Its versatility and performance make it an ideal solution for companies looking to increase their production efficiency and reduce costs.
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