Etcher/ashers manufactured by PLASMATHERM are known for their exceptional performance and reliability. These systems are extensively used in the semiconductor industry for etching and ashing processes. PLASMATHERM offers a range of etcher/ashers with different models like the 790, Versaline, and SLR 730, each offering unique benefits and functionalities. The 790 model is designed to meet the advanced process requirements of high-density plasma etching. It provides excellent control over critical dimensions and helps achieve high etch selectivity, making it ideal for etching deep and narrow features. The Versaline model is a versatile platform that offers multiple process capabilities, including etching, stripping, and surface modification. It incorporates advanced plasma sources and gas delivery systems, allowing users to tailor the process according to their specific needs. The SLR 730 model is highly regarded for its outstanding process uniformity and repeatability. It is commonly used for critical etching and ashing applications, especially in research and development labs. One of the notable advantages of PLASMATHERM etcher/ashers is their advanced process control and automation features. These systems are equipped with user-friendly interfaces, real-time monitoring, and comprehensive data analysis tools, enabling precise control and optimization. Overall, PLASMATHERM's etcher/ashers offer exceptional performance, versatility, and process control, making them a popular choice among semiconductor manufacturers and research facilities worldwide.

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