Used POLYFLOW S-314 #9378987 for sale

POLYFLOW S-314 is an etcher/asher equipment for microfabrication processes. It is designed to deliver precise etching and cleaning for a wide range of advanced semiconductor tasks. This system has been designed specifically to meet the high demands of modern production processes, allowing for high throughput, precise control, and maximum flexibility. S-314 is equipped with a three-chamber unit to allow for etching, ashing, and passivation processes. This setup provides an efficient and reliable process for different substrate sizes and process steps. The combined gas distribution machine in these chambers ensures a uniform process result, and the tool is customizable for each individual process. POLYFLOW S-314 is driven by precision robotics, allowing for automated loading and unloading operations to be performed with articular accuracy and a high throughput. This setup supports a large range of substrates and materials including organic photoresist, hard-baked resist, polyimides and metals. The samples can be pre-programmed with specific information, such as sputter parameters, pattern size, process time, and process sequence. The asset is designed for high-performance etching and cleaning of both silicon-based and non-silicon-based materials. It is equipped with throttled control valves that allow the delivery of multiple gases and the selection of parameters like pressure, flow, temperature, and power. The process variables can be adjusted to even the smallest fractions in order to achieve maximum yield and performance. Additionally, S-314 includes an operator-friendly user interface which provides easy access to all of the model functions. In addition, POLYFLOW S-314 features a dynamic isolation equipment to reduce process-induced contamination as well as a built-in set of safety features for increased reliability. The system's pressure, vacuum, temperature, and other parameters are monitored in real-time on the intuitive control panel to ensure optimal performance. The unit is also designed for low maintenance and parts replacement if necessary due to its modular design. Overall, S-314 is an advanced etcher/asher designed for microfabrication processes. Its smart design makes it an efficient and reliable machine for high-precision etching and cleaning of different materials with minimal maintenance.