Used PSC DES-106-254A #9390540 for sale

PSC DES-106-254A
Manufacturer
PSC
Model
DES-106-254A
ID: 9390540
Dry etcher.
PSC DES-106-254A Etcher/Asher is a high-performance automatic precision equipment specifically designed for dry etching, ashing, reactive ion etching (RIE) and surface cleaning of a variety of materials. This system is capable of operating at temperatures ranging from outside ambient temperature to up to 400°C and is ideal for material removal operations. DES-106-254A provides precise, low temperature plasma etching and ashing using a range of different gas mixtures. PSC DES-106-254A Etcher/Asher features a 50.9 cm (20") octagonal-shaped processing chamber with a load lock. The chamber is made from high-quality stainless steel to ensure maximum durability and prevent corrosion of the chamber components. The unit has the capacity to process 4" wafers and includes an automated material handling machine to maximize productivity. The unique design of the tool ensures that the plasma remains spatially uniform to ensure a repeatable etching / ashing rate across each wafer. DES-106-254A Etcher/Asher is highly versatile in its uses, allowing for a wide variety of etching/ashing processes to be carried out. This includes high-density plasma processes (etcher/asher) through to reactive ion etching and deep hole etching operations. The asset can accommodate a variety of different etchant gases and is capable of high-end trimming applications. In addition, the model includes utility connections for a number of other RF and DC modules to enable an even wider variety of etching / ashing operations to be performed. The equipment features a state-of-the-art graphical user interface for easy operation and monitoring, even for the most complex etching processes. The system also features a number of safety functions, including a vacuum interlock, pressure and oxygen alarms, pressure and temperature sensors to prevent unwanted operation of the unit. Overall, PSC DES-106-254A Etcher/Asher is an ideal machine for etching, ashing and other material removal operations. With its unique features, versatile application capabilities and advanced safety systems, it offers reliability and performance for even the most demanding processes.
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