Used PSC DES-212-304AVL #9273101 for sale
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PSC DES-212-304AVL is an etching / ashing equipment designed for production of advanced electronic materials. It is a turn-key system, comprising of an Alcoa type processing chamber, versatile PECVD gas delivery unit, multiple load-lock systems, an Oxide-FET pre-sensitive substrate pre-clean chamber, and a 300 mm cassette-to-cassette processing machine. This desktop etcher is designed with an open architecture that allows for easy integration of existing or additional processes. The tool is suitable for any process involving resist etching, chemical or thermal ashing, including desmear, stripping, deposition, as well as alloying, mixing, and blending compositions. This etcher is equipped with two cryogenically cooled E-beam sources - one dedicated to resist removal, and the other for surface preparation. The Alcoa type processing chamber provides an ideal environment for etching and ashing. The chamber is designed with a stainless steel inner chamber cavity plus a quartz outer wall that is impervious to outgassing while allowing for the efficient transmission of short-wavelength infrared radiation. The chamber also features a ceramic heater in the process zone which ensures independent temperature control and uniform RF power delivery throughout the chamber. The PECVD gas delivery asset offers users an efficient and accurate way to control the compositional, ionic and thermal properties of the etching atmosphere. The model can be operated in either batch or continuous mode with the precise control of various gases and materials including O2, N2, and Ar. The Oxide-FET gate pre-sensitive substrate pre-clean chamber provides an efficient and reliable way to remove organic layers and other contaminants from substrates prior to etching. PSC DES-212-304-AVL offers a complete 300 mm cassette-to-cassette processing equipment for wafer cleaning, drying and etching. The processing system utilizes a six-station conveyor to ensure efficient loading and unloading. The chamber features an aerosol shield to protect both users and wafers from inhalation. The unit is further customizable to include multiple wafer handling options such as blade handling, knife handling, and vacuum plate nipping. Overall, DES-212-304AVL is a powerful and efficient desktop etcher ideal for manufacturing clean, quality electronic components. This unit offers users flexibility and versatility in etching and ashing applications while providing the most reliable performance.
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