Used PSC DES-212 #9028318 for sale

PSC DES-212
Manufacturer
PSC
Model
DES-212
ID: 9028318
Wafer Size: 6"
Vintage: 1993
Asher, 6" 1993 vintage.
PSC DES-212 is an etcher/asher equipment designed to fulfill the need of high precision micro-structuring on wafer substrates. The primary application of this system is in the field of semiconductor processing. DES-212 unit is a fully automated x-y-z table stage with mechanized precision manipulators, enabling the user to precisely position wafers and masks for etching/ashing processes. It can also be used for direct write applications such as laser scribing, allow for repairs and removals. The machine's 200mm x 200mm x 15mm travel motion range of the x-y-z stages is able to accommodate substrates up to 6-inch diameter with a tripod placement so that all of the sample can be aligned with respect to the processing tool. The XY and Z motions are smooth even with static loads while maintaining a resolution level of up to 2 µm. The etcher/asher tool is designed to support a wide variety of processes; deep reactive ion etching (DRIE), inductively coupled plasma etching (ICP), wet etching, thin film deposition, sputtering, oxidation, deposition and resist strip. The asset is capable of performing etching/ashing on the most difficult substrates including silicon, sapphire, quartz, and aluminum. The model features a library-based process control equipment for programming the etching/ashing process parameters, as well as recipe creation and system diagnostics. It also allows for multiple wafer selection and processing, as well as temperature control, pressure control, timing and networking options allowing the unit to communicate with other device processing tools. PSC DES-212 is built with safety features like an emergency power off switch and interlocks to protect the machine from over pressurization and short circuiting, as well as a keypad guard for operator safety. The tool is designed with the user in mind, providing quick maintenance and calibration through the accessible front panel. The asset is widely used in fabs and research facilities to conduct high-precision etching/ashing processes with reliable results. As an advanced asher/etcher, it meets current industry standards for micro-structuring and the versatility it offer opens up a range of possibilities to the user.
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