Used PSC DES-212 #9198273 for sale

PSC DES-212
Manufacturer
PSC
Model
DES-212
ID: 9198273
Wafer Size: 6"
Ashers, 6".
PSC DES-212 etcher/asher is a fully automated plasma etcher/asher equipment designed to provide precise, reliable, and repeatable plasma etching, and ashing operation. The system combines the integrated hardware, software, and services necessary to achieve high throughput and superior productivity. The versatile and flexible DES-212 unit incorporates user-friendly graphical user interface, unique algorithms, and powerful hardware to meet the requirements of advanced etching and ashing applications. The machine may use an optional high tension power supply providing up to 30kV power. The tool includes an integrated PFPE based etching/ashing chamber, an etching gas distribution asset, high-speed gas switching components, a remote plasma source, and an integrated gas exhaust model. The chamber provides a uniform atmosphere with low temperature susceptance and exceptional etching uniformity. The chamber features a large range for processing various types of substrates. The chamber is designed for easy maintenance with a removable chamber window and removable door for loading and unloading substrates. The equipment's remote plasma source provides ultra-low background contamination and the highest selectivity in the process. A number of wide range parameter management functions give users the ability to optimize the etching process. The etcher/asher has a variety of features to make it a powerful, efficient and reliable system. The unit includes a real-time, user-programmable etch rate and etch time control, allowing users to adjust etch rates and parameters as process requirements change. The control panel is easily accessible, providing full control over machine parameters and easy access to recipe selection. The tool also includes an integrated RF power/matching asset for precise optimization and excellent repeatability of etching/ashing operations. PSC DES-212 is designed for unparalleled comprehensive safety, with safety certification from UL, CE, and RoHS. The model also features transportable substrates, automated dust collection and low substrate loading. Additionally, the equipment includes an integrated thermal imaging sub-system to allow automatic temperature control. The unit can also be integrated with external sources to directly print an etch pattern onto a substrate. DES-212 is an exceptional etcher/asher machine developed to meet the requirements of today's most precise etching/ashing processes. The flexibility and capabilities of the tool provide excellent precision, repeatability, and high throughput capability to satisfy demanding etching requirements.
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