Used PSC DES-304 #293616016 for sale

PSC DES-304 is a state-of-the-art etching/asher equipment designed for surface treatment and high-precision etching applications. It is a two-zone, high-vacuum system designed for a variety of processes including plasma etching, chemical etching, wet etching, etching with catalysts, deep etching, reactive ion etching, ashing, and dry etching. The unit is equipped with a quartz process chamber and a high-vacuum pumping machine. This low-maintenance tool provides a reliable and consistent etching process. The asset includes the 304-1 RF Generator, up to two-zone vacuum systems, ranging from 6" deep platforms up to 28" deep, two-zone vacuum etch systems, two-zone ashing systems, and two-zone resist removal systems. It features a process chamber with a 2" (50.8) quartz window, and an integrated process controller that can be used for etch rate and anodic current control. DES-304 also features automatic frequency tuning capabilities, allowing for easier and more reliable processes. The 304-1 RF Generator provides up to 400W of power to the process chamber. It is available in two models: low-power (0-20W) and high-power (0-400W). It is also equipped with a separate 60kV DC supply, used to bias the substrate during etching. The model also includes a 45°CW remote viewing port on each side of the chamber, allowing for direct viewing of the sample while still maintaining the integrity of the process. The equipment allows for direct control of the etch rate and is compatible with various process gases such as fluorine, chlorine, nitrogen, oxygen, and hydrogen. It is also capable of specialty processes such as deep etching and reactive ion etching with an optional manually adjustable injection angle for better process control. The system also features a recirculating cooling loop to keep components cool during longer etching processes. PSC DES-304 is an advanced etching and ashing unit designed for high-precision etching and surface treatment applications. It features a two-zone machine and low-maintenance, reliable process operation. The tool offers a variety of process capabilities such as etching, deep etching, reactive ion etching, and ashing, as well as direct process control for etch rate and anodic current. With its extensive features, DES-304 is a versatile asset suitable for diverse etching and ashing requirements.