Used PSI HEXODE MPT-HEX-1 #77366 for sale
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ID: 77366
Wafer Size: 3"
Etcher, set up for 24- 3" wafers, 22" x 30" H, ss jar programmers, Vacuum general mass flow controllers, 3 kW RF plasma supply, without vacuum system.
PSI HEXODE MPT-HEX-1 is an industrial etching and ashing process for removal of unwanted organic material from various substrates. It is a versatile, high-volume asher/etcher capable of processing up to 6 different substrates simultaneously. With a 600W of RF power and a wide range of gas mixtures and pressures, MPT-HEX-1 enables reliable, repeatable etching and ashing results. It is designed with a controlled thermal profile to ensure uniform heating and cooling rate throughout the vacuum chamber. Its state-of-the-art digital processor offers precision engineering control of the process parameters. PSI HEXODE MPT-HEX-1 features an advanced digital DC and RF power supply equipped with monitoring, regulation and adjustment capabilities, to enable precise control of the etching and ashing processes. Its patented multi-chamber design and large vacuum chamber ensures uniform substrate temperature and allows simultaneous loading of up to 6 substrates of various shapes and sizes. This can significantly reduce the processing time, resulting in improved efficiency and higher throughput. The system also includes a variety of durable engineering-grade consumables and accessories for optimum process performance. Its precision gas mixture control minimizes operational costs, while the internal cyclonic filter helps minimize particulate contamination. Additionally, it allows for a high tolerance in stress and temperature gradients, making it suitable for sensitive material processing. The system also offers a variety of compatibility with a wide range of media, permitting the user to process a versatile range of substrates. MPT-HEX-1 is an excellent choice for high-volume, precision etching or ashing operations. With its advanced digital processor, robust construction and wide substrate compatibility, PSI HEXODE MPT-HEX-1 is a reliable, efficient, and cost-effective industrial etcher and asher.
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