Used PSK DAS 2000 #9243882 for sale

PSK DAS 2000 is a high-end etcher/asher developed by PSK Corporation. It is a stand-alone equipment designed to provide reliable etching/ashing of substrates from 2 inch to 6 inch wafers. The system features a high speed substrate transport unit and a fully integrated wafer cassette allowing it to handle up to four wafers at a time. PSK DAS-2000 is equipped with a high-precision motor that securely moves the wafer through a variety of process zones. These include an automatic substrate loader, injection zone, wet etching zone, dry etching/ashing zone, and the wafer unloader. The wet etching zone uses aqueous solutions and ULPA filtered hot air to quickly etch all substrates with maximum repeatability and uniformity. The dry etching/ashing zone combines the use of ULPA filtration with inert nitrogen or argon to achieve precise etching and ashing of a variety of substrates. The machine also features an integrated load lock and unmatched temperature control up to 400 °C. It is compatible with all industry standard chemicals allowing users to etch and ash a wide range of substrates. This feature saves time and money as it eliminates the need to buy often costly special solutions for various substrates. DAS 2000 is designed with a fast cycle time and a proven end-point detection tool to help optimize process efficiency. Furthermore, it has reliable operation and ensures a non-stop 24/7 availability and throughput. This is all ensured through robust and reliable hardware components and an easy-to-use touch-screen user interface that provides real-time control and error-free operation. Overall, DAS-2000 is a powerful, reliable and robust etcher/asher that offers maximum repeatability and uniformity. Its efficiency, intelligent features and wide compatibility make it an ideal choice for any etching or ashing application.