Used PSK DAS 2000 #9276091 for sale

PSK DAS 2000
Manufacturer
PSK
Model
DAS 2000
ID: 9276091
Wafer Size: 8"
PR Stripper, 8" Cassette: (2) Stages MFC Process gas: (2) 4% H2/N2 500 sccm (2) O2 3SLM (2) N2 1000 sccm Purge gas: N2 FCIP: Microwave: ASTEX FI20160-1 Maximum output: 3.0 kW M/W Power head: ASTEX FI20162-1 ASTEX FI20162-3 Aligner: RA101A-010 PUMP: Pressure control: MKS 653B-2-50-2 Pressure gauge capacidense manometer: MKS 626A 2-Torr Power supply: Main power: AC, 208 V, 150 A, 3Φ, 60 Hz, 21700 VA, 60 FLA UPS Power AC, 208 V, 20 A, 1Φ, 60 Hz, 2080 VA, 10 FLA Transfer robot: RR701L 120-Z20-011 Robot controller: RRS701-RC420-SUCU Main PC MFC: AERA FC-D980C.
PSK DAS 2000 is a highly efficient wafer etcher / asher equipment designed for small to medium sized etching and ashing applications. This system features an improved and upgradeable design featuring new features such as greater process control, high resolution imaging, and a straightforward design for ease of use. The unit utilizes two tightly coupled chambers with a conveyor belt design for easy loading. The first chamber is the pre-etch / pre-ash chamber which provides the atomic oxygen needed to properly prepare the wafer surface prior to etching or ashing. This chamber integrates an advanced Hot-Walled RF Input Power Source which enables high-temperature and low-pressure operation to deliver superior performance and greater flexibility than traditional RF power sources. The second chamber is the Plasma Etching / Ashing Chamber which utilizes an advanced low-pressure single frequency, multi-target glow discharge power source. The integrated controller offers an easy-to-understand graphical user interface with integration options for on-screen display of pressure, power, and temperature readings. This chamber also offers increased control of etching / ashing parameters such as accuracy, conformity, and passivation. The machine also comes equipped with an advanced image capturing tool which enables users to record etch patterns and analyze them for greater control and repeatability. Additionally, the asset offers superior safety features such as a programmable alarm model and process abort feature. Overall, PSK DAS-2000 is an extremely efficient and comprehensive etcher / asher equipment designed to provide higher levels of process control and superior results than its predecessors. The systems intuitive design provides faster time-to-results while its easy-to-use graphical user interface and powerful features make it an ideal choice for laboratory and industrial etching and ashing.
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