Used PSK DAS III #9243656 for sale

PSK DAS III is a high-performance asher/etcher designed to provide complete control over etching and ashing processes. It is capable of producing a wide variety of custom processes from standard photolithography etching to advanced sputtering and reactive ion etching. DAS III uses dual heat sources to enable precise regulation and control of each etch process, providing a consistent output of results with minimal substrate damage. The equipment is designed for up to three-dimensional patterning and possesses a high vacuum capability, enabling etching processes to be carried out without contamination. The system also features a high-performance scan mask that can precisely define the pattern to be etched, including any irregularities in the pattern which PSK DAS III can recognize and compensate for. DAS III includes a multi-zone chamber design, which allows different process regions of the etch chamber to be tuned to different temperatures, allowing for accurately shaped etches and uniform etch depths. Programmable interlocks ensure that processing parameters, such as gas pressure, temperature and flow rate, remain within optimal ranges. In addition, an integrated cassette library provides organized access to work pieces, allowing for efficient loading and unloading of samples in the etching chamber without contamination. The chamber is temperature controlled to a maximum of 200°C, allowing for high rates of etching without damaging heat-sensitive substrates. The unit also features integrated diagnostic systems, such as real-time data collection and parameter monitoring software, that assist operators with optimal operation of the machine. PSK DAS III also includes a laboratory-specific interface that allows for compatibility with laboratory processes and data collection. With its reliable, user-friendly performance, DAS III provides excellent control over your etching process.