Used PSK Supra III #9281480 for sale

PSK Supra III is an etcher/asher, designed for use in automated semiconductor processing applications. It is a high-speed, high-pressure, cost-effective etch/ash solution. The equipment consists of an integral vertical tube furnace, a multi-zone hot zone, a rotary planetary etch/ash chamber, and an automated process control interface. This system allows for precise control of the etching/ashing process temperature and time. The vertical tube furnace features a cavity of 33.5 inch diameter and is capable of reaching a maximum temperature of 1220 °C. The furnace has one internal heating zone to uniformly heat the entire process tube. The hot zone is composed of three zones with adjustable electrical energy input and independent temperature control. The hot zone is composed of a lower zone, intermediate zone and upper zone. The hot zone provides uniform temperature distribution throughout the processing tube. The rotary planetary etch/ash chamber is designed to provide optimal etch/ash profile. The chamber consists of a rotating disk that holds various substrate holders, rotates at speeds up to 13.5 rpm, and is capable of operating at pressures up to 303 mBar. The chamber includes an automatic unit of temperature-controlled showers that can be employed for further uniformity of etch/ash profile. Supra III includes a fully automated process control interface for complete control over the etching/ashing process. The interface allows for adjustable parameters such as pre-conditioning temperature, etch/ash dwell time, vessel pressure, disk rotation speed, shower temperature, and other parameters to be set. Additionally, the interface provides a comprehensive view of the process with various display options. The interface also provides real-time monitoring and can be used to generate online reports. PSK Supra III is an ideal etch/ash solution for high-throughput automation. It offers consistent, reliable performance in an automated environment. By providing precise control of the process temperature and time, the machine allows for repeatable etch/ash performance. The flexibility of the tool makes it suitable for a wide range of etch/ash processes.