Used PSK Supra Vm #9363509 for sale

ID#: 9363509

Manufacturer:

PSK

Model:

Supra Vm

Vintage:

2013

Wafer Size:

12"

Equipment Details:

PR Stripper, 12"

SFEM:
CYMECHS Duraport-DM LPM
SANKYO SR8240PSK09 Robot
SANKYO SC5000 Robot controller
SANKYO TP5000-0001 Teaching pendant

TM:
SANKYO SR8250PSK02 Robot
SANKYO SC5000 Robot controller
SANKYO TP5000-0001 Teaching pendant

Chambers:
MKS 626A02TBE Manometer
NANOTEK NEFL-309S EPD
VAT 61240-PEAQ-ASF2 APC Controller
OEM V77-D-716-13-053 Slit valve
MKS Smartpower Microwave

(3) Gas boxes:
GAS1: MKP TSC-S220, O2 / 20000 SCCM
GAS2: MKP TSC-S220, N2 / 3000 SCCM
GAS3: MKP TSC-S220, H2 (4%) + N2 (96%) / 3000 SCCM

Power supply:
Main power: 3Φ, 208 V, 60 Hz
UPS Power: 1Φ, 208 V, 60 Hz

2013 vintage.
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