Used PSK TERA 21 #9244821 for sale

PSK TERA 21
Manufacturer
PSK
Model
TERA 21
ID: 9244821
Wafer Size: 12"
Vintage: 2004
Etcher, 12" 2004 vintage.
PSK TERA 21 is an etcher / asher, designed to provide precision etching and ashing processes for research and development projects. The etcher / asher utilizes atmospheric pressure plasma technology to produce high-quality results with precise control over process parameters. The device utilizes two wide-range gas systems; one for etching and one for ashing. It features an optional cold plate cooling equipment, allowing for precise control of the temperature and pressure of the gas applied and temperature of the etched/ashed surfaces. TERA 21 features a large substrate-holding chamber with a magnetically-shielded working chamber, allowing for high-resolution etching/ashing with minimal contamination. The interior of the chamber is constructed from stainless steel and ceramic-coated aluminum, ensuring easy maintenance and high thermal efficiency. The gas supply system features a mass-flow controller with heated transfer lines, ensuring accurate control of the gas utilized in the process. The process control unit featured in PSK TERA 21 is based on advanced PLC technology, allowing for the setting and storage of specific etching/ashing parameters. Control knobs located near the interface can be used to dial in the required parameters for any given process. The same control machine is also used to control the optional cooling tool; the temperature of the etching/ashing surface is regulated through the cooling plate. The device features a number of safety features, such as automatic shut-off when the chamber is opened and an emergency stop button. The gas supply asset is also placed in a separate room, further isolating the device from any potential hazards. TERA 21 has been designed with convenience and user-friendliness in mind. All components are modular and can be replaced easily without the need for any tools. In addition, the display panel features a multilingual menu, allowing operators of any national background to quickly familiarize themselves with the control model. Finally, the device is capable of being connected to standard compressed gas supply systems.
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