Used PSK TERA 21 #9355264 for sale

PSK TERA 21 is a highly efficient and reliable etcher and asher equipment specifically engineered for advanced processing in the semiconductor industry. This versatile etcher/asher offers high throughput and flexibility for a wide range of processes such as thin-film etching and oxide deposition. TERA 21 is designed with an ultra-high throughput rate of 200W on a single wafer, it can produce rate up to 200nm / min. With this capability, compact, single-wafer systems are able to rapidly process up to 200 wafer/hr. Additionally, the versatile gas delivery equipment allows a wide range of gas concentration levels to be easily adjusted, enabling users to precisely tailor their process recipe to meet exacting requirements. The versatile PSK TERA 21 is also capable of applying a wide range of sources of reactive species such as chlorine, boron trichloride, fluorine, SF6 and other chemicals used in semiconductor processing. It is equipped with automated RF matching circuit technology that enables accurate and precise delivery of the desired species concentration. The system is also reliable and highly precise, with temperature control tolerant up to ±1 °C, enabling repeatable process results every time. This advanced etcher/asher unit also offers superb etch product uniformity and yield. Its advanced optics and image recognition systems provide product quality assurance as well as high yield per unit wafer. Additionally, the powerful electronics control and video monitor machine provide users with an easy-to-use interface, making the etch/asher process safer and more efficient. In summary, TERA 21 is a reliable and high performing etcher/asher tool that is ideal for advanced semiconductor processing. Its versatile gas delivery systems ensure precise delivery of the desired species, and the ultra-high throughput rates enable production of up to 200nm/min. Furthermore, the temperature control, image recognition systems and video monitor provide an easy-to-use interface for complete process control.