Used PVA 350 #9032147 for sale

PVA 350 is an advanced, high throughput etcher/asher designed for Passivation, etching and ashing applications up to 350mm substrate sizes. It offers industry leading process capabilities with a robust and expandable equipment design that allows for a wide variety of etching chemistries. The system is equipped with advanced features and modern process control capabilities, enabling fabricators to coordinate intricate tool cycles with exceptional repeatability and reliability. 350 contains a large chamber for etching process and is equipped with a liftable hatch to allow for efficient substrate handling. Utilizing a modular design, the unit is able to incorporate several etching tools including shaker, spin etcher, chemical bath and plasma asher, as well as single and double sided processes. It is also highly configurable which allows for user customization of process cycles, tool enhancements and other feature upgrades. The machine is also designed with user safety in mind with secure interlocks, ventilated enclosures, and automatic safety shutoff systems. Furthermore, the user friendly touch screen provides programmable control of process parameters including temperature, time and tool rotation speed to ensure accurate and repeatable etching cycles. With its advanced features, PVA 350 is capable of providing high quality etching solutions for a wide range of custom applications in the advanced packaging, MEMS, and optoelectronics industries.