Used PVA 650 #9400631 for sale

PVA 650 is an etcher/asher from Plasma etch used in the fabrication of microelectronic devices. It is a high performance and technologically advanced etcher/asher that is designed to meet the requirements of the semiconductor industry. 650 is constructed of a stainless steel chamber and is designed to provide a uniform plasma etch or asher across the entire working area. Its design allows for vertical etched holes (up to 3mm in depth) and the ability to etch various types of substrates including Silicon, Silicon carbide, and Gallium Nitride. In addition, it is capable of etching metals such as aluminum, copper, and titanium. PVA 650 features a 10.4" display and intuitive touchscreen operation, making it extremely easy to use. It also includes a 12" x 12" work area and a novel chamber purge system for rapid throughput. In addition, 650 has an efficient high frequency bias that enables precise control of ion energies at the substrate surface. It also offers high temperature process capability with a maximum of 300°C, allowing the most demanding etching and ashing requirements to be met. PVA 650 is highly reliable with excellent uptime and is engineered with safety measures in place to ensure the best working conditions. Various interlock systems are in place to protect both personnel and equipment. Also, automated process monitoring, advanced recipes, and user password protection are implemented to facilitate routine operation and process control. 650 is a versatile piece of equipment, enabling a wide range of etching and ashing applications and is ideal for a variety of fields including contact-less packaging, MEMS fabrication, micromachining and more. Furthermore, this advanced system is ideal for true production and research work, offering high etch rates, precise plasma control, and efficient repeatability.