Used PVA TEPLA 400 #293821967 for sale
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ID: 293821967
Vintage: 2006
Microwave plasma system
Runtime: ~8000+ hours
Main unit only
Excluded items: vacuum pump, gas supply system
2006 vintage.
PVA TEPLA 400 is an etcher and asher that is developed and produced by Plasma-Therm. This technologically advanced equipment is an invaluable tool for a variety of processes that require etching or ashing. It is used by industries such as semiconductor manufacturing, micro-electronics, and life science research. 400 consists of an advanced vacuum process tool that houses a Next Generation Plasma Source, a Processor Chamber, a Source Chamber, and a Miniature MFC. The Plasma Source is used to generate a controlled plasma in the Processor Chamber, while the Source Chamber is used to generate a more powerful plasma. The Miniature MFC is used to control the plasma. This allows PVA TEPLA 400 to accurately carry out etching and ashing processes in an environmentally safe manner. 400 is highly efficient in its ability to deliver precise and repeatable results. Its patented acoustic levitation technology eliminates contact between the etchant and processed wafer, creating a non-thermal environment. This minimizes stress on the wafer and ensures a consistent etching/ashing process. PVA TEPLA 400 also offers a variety of features designed to ensure process safety and stability. Its Gas Interface Control (GIC) system ensures optimized RF power delivery, while the automatic hydrofluoric acid scrubber eliminates airborne etching and ashing residues. In addition, 400 has built in process diagnostics that allow operators to quickly analyze and fine-tune processes. PVA TEPLA 400 is a sophisticated etcher/asher from Plasma-Therm that offers exceptional capabilities for process engineers. It ensures precise and repeatable performance, while its advanced features maximize safety and control. 400 is sure to be an invaluable asset for many industries that require etching/ashing processes.
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