Used PVA TEPLA Plasma system #293764169 for sale
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ID: 293764169
Graphical User Interface (GUI)
RF Power generator
Precursor
Keyboard
Tray
Stainless steel
LCD Touch panel
Process pressure: 100-2000 m Torr
Process gas: 1.4 - 2.7 bar (20-40 psi)
Purge gas: 1.4 - 2.7 bar (30-40 psi)
Compressed air: 5.4- 6.8 bar (80-100 psi)
(3) Stages with integrated gate valves
(3) Mass Flow Control (MFC) gases
Options:
Capacitance manometer
Pressure monitor: 1%
Pressure controller
Light tower
Bar code reader
Recirculating liquid chiller
Monomer processing kit
Heated gas line
N2 and H2 Generator
Exhaust abatement system
Liquid injector system
Operating system: Windows
Power supply: 380~415 VAC, 3 Phase, 15 A, 50/60 Hz.
PVA TEPLA Plasma equipment is a cutting-edge etcher/asher specifically designed for plasma cleaning, surface modification, and etching processes in various industries including semiconductor, microelectronics, solar cell, and research institutions. This advanced system offers unmatched precision, control, and repeatability in its operations, making it an essential tool for applications requiring precise surface treatment. At the heart of Plasma unit is its plasma generation technology, which utilizes a high-frequency power supply to create a low-pressure plasma environment within the process chamber. The plasma consists of highly reactive species such as ions, radicals, and electrons, which interact with the surfaces of the substrates to achieve the desired cleaning or etching effects. The machine's plasma generation technology allows for fine-tuning of plasma parameters such as gas composition, pressure, and power levels, enabling users to tailor the process to their specific requirements. PVA TEPLA Plasma tool features a versatile chamber design that accommodates a wide range of substrate sizes and materials, from small semiconductor wafers to large glass panels. The asset's modular configuration allows for easy customization and upgrades to meet evolving process needs. The process chamber is equipped with a range of temperature control options, including heating and cooling capabilities, to optimize the plasma treatment conditions for different materials and applications. One of the key strengths of Plasma model is its advanced process control capabilities, which enable precise monitoring and adjustment of process parameters in real-time. The equipment is equipped with a user-friendly interface that provides intuitive control over plasma parameters, recipe management, and data logging. Integrated sensors and diagnostic tools allow for in-depth analysis of process performance, ensuring consistent and reliable results across multiple runs. PVA TEPLA Plasma system offers a wide range of plasma cleaning and etching capabilities, including substrate cleaning, surface activation, material removal, and pattern transfer. The unit's high-performance plasma source delivers uniform and efficient processing over large substrate areas, resulting in high-quality surface treatments with minimal variation. With its flexible process recipes and customizable settings, the machine can accommodate a variety of applications ranging from routine cleaning to complex etching processes. In addition to its cutting-edge technology and advanced capabilities, Plasma tool is designed with user safety and environmental sustainability in mind. The asset features safety interlocks, exhaust systems, and gas management controls to ensure operator protection and compliance with industry regulations. The model's efficient use of gases and energy minimizes environmental impact while maximizing process efficiency and cost-effectiveness. In conclusion, PVA TEPLA Plasma equipment is a state-of-the-art etcher/asher that offers unparalleled precision, control, and reliability for plasma cleaning, surface modification, and etching applications. With its advanced plasma generation technology, versatile chamber design, and comprehensive process control features, the system is a valuable tool for industries and research institutions seeking to achieve optimal surface treatments with high reproducibility and efficiency.
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