Used PVA TEPLA / TECHNICS 300-E #9049959 for sale
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ID: 9049959
Plasma cleaning unit
Applications:
Photoresist stripping
Mask etching
Surface cleaning
Etching of class and ceramics
Etching of SiO2
Si3N4
Si
Removal of Polyimid and
Passivation layer process chamber
Quartz with Kapton cover
(3) Separate gas channels
Maximum rate per channel: 500 sccm
Working pressure: 0.5-1.5 mbar
250 V, 15 A.
PVA TEPLA / TECHNICS 300-E is an etcher / asher that is used for various surface-finishing operations. This etcher / asher has a wide variety of features and applications. TECHNICS 300-E utilizes a resistive heating process to rapidly etch and asher surfaces. It is capable of subjecting parts to a temperature range of up to 250°C, temperature regulation range of up to ±1°C, and time control range of up to 30 sec. The temperature control accuracy is ±2°C and adjustable in increments of 0.1°C. This etcher / asher is designed for single-zone thermal processing and able to operate in both vertical and horizontal modes. It also features a vacuum tank design which enables precise process repeatability for more accurate and consistent results. This etcher / asher is equipped with an automatic safety system which comprises of an IC temperature controller and ground fault device, along with an emergency stop switch. The built-in cooling system ensures that it does not exceed the operational temperature limit thus protecting the samples. PVA TEPLA 300E provides various etching and ashing configurations such as single-wafer, batch, and semi-batch. It has a process chamber size of 200 mm (width) x 300 mm (length) x 250 mm (depth) with SiC heating elements for uniform heating of samples. It is also capable of 14-inch wafer processing. Overall, 300-E is an etcher / asher designed for efficient and precise surface finishing operations. It is equipped with a wide variety of features including a process chamber size, temperature control, adjustable time control, emergency stop switch, and IC temperature control. It also includes various etching and ashing configurations to meet the specific needs of the operators.
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